JPH0259635B2 - - Google Patents

Info

Publication number
JPH0259635B2
JPH0259635B2 JP58207233A JP20723383A JPH0259635B2 JP H0259635 B2 JPH0259635 B2 JP H0259635B2 JP 58207233 A JP58207233 A JP 58207233A JP 20723383 A JP20723383 A JP 20723383A JP H0259635 B2 JPH0259635 B2 JP H0259635B2
Authority
JP
Japan
Prior art keywords
resistance
elements
resistive
pressure
same
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58207233A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60100475A (ja
Inventor
Akimitsu Kawaguchi
Minoru Hirai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shindengen Electric Manufacturing Co Ltd
Original Assignee
Shindengen Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shindengen Electric Manufacturing Co Ltd filed Critical Shindengen Electric Manufacturing Co Ltd
Priority to JP58207233A priority Critical patent/JPS60100475A/ja
Publication of JPS60100475A publication Critical patent/JPS60100475A/ja
Publication of JPH0259635B2 publication Critical patent/JPH0259635B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
JP58207233A 1983-11-04 1983-11-04 半導体圧力センサ Granted JPS60100475A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58207233A JPS60100475A (ja) 1983-11-04 1983-11-04 半導体圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58207233A JPS60100475A (ja) 1983-11-04 1983-11-04 半導体圧力センサ

Publications (2)

Publication Number Publication Date
JPS60100475A JPS60100475A (ja) 1985-06-04
JPH0259635B2 true JPH0259635B2 (en]) 1990-12-13

Family

ID=16536433

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58207233A Granted JPS60100475A (ja) 1983-11-04 1983-11-04 半導体圧力センサ

Country Status (1)

Country Link
JP (1) JPS60100475A (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07113647B2 (ja) * 1988-09-02 1995-12-06 日産自動車株式会社 半導体加速度センサ
JP2015184046A (ja) * 2014-03-20 2015-10-22 セイコーエプソン株式会社 物理量センサー、圧力センサー、高度計、電子機器および移動体
JP6318760B2 (ja) * 2014-03-25 2018-05-09 セイコーエプソン株式会社 物理量センサー、高度計、電子機器および移動体

Also Published As

Publication number Publication date
JPS60100475A (ja) 1985-06-04

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